Contract award notice
Results of the procurement procedure
Section I: Contracting
entity
I.1) Name and addresses
Cardiff University
Procurement Services, McKenzie House, 30-36 Newport Road
Cardiff
CF24 0DE
UK
Telephone: +44 2920879648
E-mail: halea3@cardiff.ac.uk
NUTS: UKL
Internet address(es)
Main address: http://www.cardiff.ac.uk/business/why-work-with-us/for-suppliers
Address of the buyer profile: https://www.sell2wales.gov.wales/search/Search_AuthProfile.aspx?ID=AA0258
I.2) Joint procurement
The contract is awarded by a central purchasing body
I.4) Type of the contracting authority
Body governed by public law
I.5) Main activity
Education
Section II: Object
II.1) Scope of the procurement
II.1.1) Title
Photolithography Cluster
Reference number: CU.769.TH
II.1.2) Main CPV code
38000000
II.1.3) Type of contract
Supplies
II.1.4) Short description
The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media.
This tender is separated into 3 lots that will be referred to as:
- Lot 1: Spin, bake & prime
- Lot 2: Developer (TMAH)
- Lot 3: Developer (Solvent)
II.1.6) Information about lots
This contract is divided into lots:
Yes
II.1.7) Total value of the procurement
Value excluding VAT:
339 352.00
GBP
II.2) Description
Lot No: 1
II.2.1) Title
Spin, bake & prime
II.2.2) Additional CPV code(s)
38000000
II.2.3) Place of performance
NUTS code:
UKL22
II.2.4) Description of the procurement
Spin, bake and prime tool
II.2.5) Award criteria
Quality criterion: quality
/ Weighting: 80
Price
/ Weighting:
20
II.2.11) Information about options
Options:
No
II.2.13) Information about European Union funds
The procurement is related to a project and/or programme financed by European Union funds:
Yes
Lot No: 2
II.2.1) Title
Developer (TMAH)
II.2.2) Additional CPV code(s)
38000000
II.2.3) Place of performance
NUTS code:
UKL22
II.2.4) Description of the procurement
The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc).
II.2.5) Award criteria
Quality criterion: quality
/ Weighting: 80
Price
/ Weighting:
20
II.2.11) Information about options
Options:
No
II.2.13) Information about European Union funds
The procurement is related to a project and/or programme financed by European Union funds:
Yes
Lot No: 3
II.2.1) Title
Developer (Solvent)
II.2.2) Additional CPV code(s)
38000000
II.2.3) Place of performance
NUTS code:
UKL22
II.2.4) Description of the procurement
The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc).
II.2.5) Award criteria
Quality criterion: quality
/ Weighting: 80
Price
/ Weighting:
20
II.2.11) Information about options
Options:
No
II.2.13) Information about European Union funds
The procurement is related to a project and/or programme financed by European Union funds:
Yes
Section IV: Procedure
IV.1) Description
IV.1.1) Type of procedure
Open procedure
IV.1.8) Information about Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement:
Yes
IV.2) Administrative information
IV.2.1) Previous publication concerning this procedure
Notice number in the OJ S:
2021/S 235-620479
Section V: Award of contract
Lot No: 1
Title: Spin, bake & prime
A contract/lot is awarded:
Yes
V.2 Award of contract
V.2.1) Date of conclusion of the contract
01/03/2022
V.2.2) Information about tenders
Number of tenders received: 5
Number of tenders received from SMEs: 5
Number of tenders received from tenderers from EU Member States: 5
Number of tenders received from tenderers from non-EU Member States: 0
Number of tenders received by electronic means: 5
The contract has been awarded to a group of economic operators:
No
V.2.3) Name and address of the contractor
Inseto UK Ltd
Unit 25 Focus Way, Focus 303 Business Centre
Andover
SP105NY
UK
NUTS: UKJ35
The contractor is an SME:
Yes
V.2.4) Information on value of the contract/lot (excluding VAT)
Total value of the contract/lot:
: 151 780.00
GBP
V.2.5) Information about subcontracting
Section V: Award of contract
Lot No: 2
Title: Developer (TMAH)
A contract/lot is awarded:
Yes
V.2 Award of contract
V.2.1) Date of conclusion of the contract
01/03/2022
V.2.2) Information about tenders
Number of tenders received: 5
Number of tenders received from SMEs: 5
Number of tenders received from tenderers from EU Member States: 5
Number of tenders received from tenderers from non-EU Member States: 0
Number of tenders received by electronic means: 5
The contract has been awarded to a group of economic operators:
No
V.2.3) Name and address of the contractor
Inseto UK Ltd
Unit 25 Focus Way, Focus 303 Business Centre
Andover
SP105NY
UK
NUTS: UKJ35
The contractor is an SME:
Yes
V.2.4) Information on value of the contract/lot (excluding VAT)
Total value of the contract/lot:
: 79 451.00
GBP
V.2.5) Information about subcontracting
Section V: Award of contract
Lot No: 3
Title: Developer (Solvent)
A contract/lot is awarded:
Yes
V.2 Award of contract
V.2.1) Date of conclusion of the contract
01/03/2022
V.2.2) Information about tenders
Number of tenders received: 5
Number of tenders received from SMEs: 5
Number of tenders received from tenderers from EU Member States: 5
Number of tenders received from tenderers from non-EU Member States: 0
Number of tenders received by electronic means: 5
The contract has been awarded to a group of economic operators:
No
V.2.3) Name and address of the contractor
Inseto UK Ltd
Unit 25 Focus Way, Focus 303 Business Centre
Andover
SP105NY
UK
NUTS: UKJ35
The contractor is an SME:
Yes
V.2.4) Information on value of the contract/lot (excluding VAT)
Total value of the contract/lot:
: 108 121.00
GBP
V.2.5) Information about subcontracting
Section VI: Complementary information
VI.3) Additional information
(WA Ref:119171)
VI.4) Procedures for review
VI.4.1) Review body
High Court
Royal Courts of Justice, The Strand
London
WC2A 2LL
UK
Telephone: +44 2079477501
VI.5) Date of dispatch of this notice
01/03/2022